Contact person:Baogang Quan
In the 'PHABLE' mode, sub-micron linear gratings and 2D patterns such as hexagonal and square lattices are printed with high uniformity and quality. In the 'mask aligner' mode, micron scale features can be printed easily. The PhableR 100 tool provides unprecedented ability to print high resolution periodic structures in a low-cost photolithography system. It is similar to a conventional mask-aligner where a photoresist coated wafer is put in proximity to a mask and exposed by a beam of UV light. PhableR 100S is widely used to fabricate sub-micron linear gratings and 2D patterns for LED, display, solar cell, photonic crystals, plasmonic devices and so on.