USA Semilab GES5E Ellipsometer
Technical specifications and key features:
Light source: Xenon Lamp
Source Power: 75 W
Light Spectrum: UV-VIS 230-900nm, FWHM< 0.5nm
Probe diameter: 1 - 5 mm
Probe size on sample: 3 mm X 12 mm ( @ 75°grazing angle)
Precision and accuracy: 50 mm 200Å SiO2/Si standard, thickness repeatability of 0.5 Å and accuracy of 5 Å
Contact person：Wuxia Li
Techniques and Applications:
For measuring the thickness, optical constants and micro-structures of semiconductor, dielectric materials, polymer, organic materials, metal, multilayered structures and those at the interfaces.
