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Cleanroom in Building C
The Lab of LMF is situated in the 1st floor. The cleanroom area is over 300 m2 and it is equipped with a almost all the necessary micro-/nanofabrication facilities.
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Cleanroom in Building M
The Lab of LMF is situated in the 1st and 2nd floor of the West Wing of Building M. The cleanroom area reaches 730 m2 and it is equipped with a broad range of advanced facilities.
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Class 1000 Cleanroom
Facilities in 1000 Class cleanroom area include FIB/SEM, RIE, ICP, FT-IR, 3D optic Profiler etc.
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Class 100 Cleanroom
Equipments in 100 Class cleanroom area include EBL, NI, 3D DLW, Spin coater, etc.
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Visitor's Corridor of LMF
You can see all the facilities of the lab from the corridor.
