Facilities

Shenyang Scientific Instrument RZF400 Thermal Evaporator
Technical specifications and key features:
Metal sources: various widely used metals
Vacuum:: ~10-7 Torr
Sample holder: 2 inches, 4 inches and small pieces of samples
Uniformity: <3%
Max. number of crucibles: 3
Live thickness monitoring
Contact person:Baogang Quan

Techniques and Applications:
For various types of materials depositions during devices and structures fabrication.