People

Zhongshan Zhang
Associate Professor, Ph. D in Engineering
Tel:010-82649098
Fax:010-82648198
E-mail:zhangzs@iphy.ac.cn
Location: Rm. 201, Bldg. M

Career History
Recive PhD in 2016 from Suzhou University;  then a postdoctoral fellow at Institute of Acoustics, CAS from 2016 to 2018; currently, he is a associate professor of institute of physics, CAS

Duties
ICP, RIE and PECVD

 

Research Interests
● Chip scale atomic clock
● Film bulk acoustic resonator
● MEMS/NEMS seneor