People

Prof. Haifang Yang
Ph. D. in Physics, Director, Laboratory of Microfabrication
Tel:010-82649831
Fax:010-82649831
E-mail:hfyang@iphy.ac.cn
Location: Rm. 904, Bldg. M
Career History
In 2003, he received his Ph. D. degree from the Institute of Physics, Chinese Academy of Sciences. In the same year, joined the Institute of Physics, Chinese Academy of Sciences as an engineer, during which worked as a short-term visiting scholar in Rutherford Laboratory. In 2006, appointed as the deputy Chief engineer of the Institute of Physics, Chinese Academy of Sciences, and went to Delon University of Sweden as a short-term visiting scholar, and is currently the Chief engineer of the Micromachining Laboratory of the Institute of Physics, Chinese Academy of Sciences

 

Duties
● In charge of the overall activities of the Lab, issues including research, development and finance
● Responsibility engineer of EBL (Buld. C), Laser Direct Writing, Resist Remover, and Water purification system, etc.
Research Interests
● Research of e-beam lithography related arts and technique
● The fabrication and properties of micro/nano-devices
Papers,projects and awards
● More than 70SCI published papers, including the Nature Nanotech., Adv. Mater., Adv. Func. Mater., Scientific Reports, and other international academic journals
● Authorized more than 10 invention patents
● Complete research projects including a 973 project, and other projects funded by NSFC and instrument project of CAS as a chair.
● The “Outstanding Technical Talents" Plan -"key Technical Talent” of Chinese Academy of Sciences (2010).