Guangzhou Geng
Engineer , Master of Science and Engieering
Tel：010-82649098
Fax：010-82648198
E-mail：genggz@iphy.ac.cn
Location: Rm. 201, Bldg. M
Career History
Recive Master degree in 2013 from Qingdao University; currently, he is a engieer of institute of physics, CAS
Duties
ALD, ICP, RIE and PECVD
Research Interests
● Reaction ion etching of silica-based and III-V materials
● The chemical vapor deposition of the silica-based film
● The fabrication and the electrooptical properties of 3D micro/nano-structures
