Overview：

We offer appropriate training to long term users who want access to the Cleanroom and facilities twice a year.  Before embarking on any training you must have your supervisor’s approval, be a registered visitor and have an access card valid for the C or M building.

For those of you who wish to use the Cleanroom equipment for only a few hours, we may arrange supervised access - please contact Aizi Jin

Cleanroom Access and Training Procedure

1. Plan ahead, download the Application Form, get supervisor’s approval and register officially.
2. LMF Health & Cleanrrom Safety session. Attend the Cleanroom Induction, during which you sign off all Cleanroom risk assessments and take a Cleanroom safety tour.
3. Health & Cleanrrom Safety Test and examinations
4. Equipment training
5. Equipment driving test
6. Permit to Access Controlled Areas and Facilities after demonstration of Competence using the cleanroom and trained equipments

 

Equipment for training：

Item No. Equipment Contact Person 1 FIB （2 Sets） Aizi Jin 2 Helium ion microscopy Shibing Tian 3 EBL-Raith 150 Haifang Yang 4 EBL-JEOL 6300FS Guangzhou Geng 5 UV Mask Aligner（2 Sets） Baogang Quan 6 3D Direct Laser Writing Baogang Quan 7 Laser Direct Writing Haifang Yang 8 Nano imprinting Aizi Jin 9 Reaction ion etching （2 Sets） Zhongshan Zhang 10 ICP Reaction ion etching （2 Sets） Zhongshang Zhang 11 Ion Beam Etching （2 Sets） Baogang Quan 12 Microwave Plasma Haifang Yang 13 Atomic Layer Deposition Guangzhou Geng 14 Thermal Evaporator （2 Sets） Junxiang Yan 15 Electron Beam Evaporator （2 Sets） Junxiang Yan 16 PECVD （2 Sets） Zhongshan Zhang 17 Slicer Zhongshan Zhang 18 Dekteck Profiler （2 Sets） Aizi Jin 19 Wire-bonder （2 Sets） Aizi Jin 20 Atomic Force Microscope （2 Sets） Shibing Tian 21 Ellipsometer Zhongshan Zhang 22 Jannis Probe-stage Shibing Tian 23 Rapid Thermal Annealing Zhongshan Zhang 24 White Light 3D Surface Profiler Guangzhou Geng 25 Nano-indentation Aizi Jin