Overview:

We offer appropriate training to long term users who want access to the Cleanroom and facilities twice a year.  Before embarking on any training you must have your supervisor’s approval, be a registered visitor and have an access card valid for the C or M building.

For those of you who wish to use the Cleanroom equipment for only a few hours, we may arrange supervised access - please contact Aizi Jin or Chengchun Tang

Cleanroom Access and Training Procedure

  1. Plan ahead, download the Application Form, get supervisor’s approval and register officially.
  2. LMF Health & Cleanrrom Safety session. Attend the Cleanroom Induction, during which you sign off all Cleanroom risk assessments and take a Cleanroom safety tour.
  3. Health & Cleanrrom Safety Test and examinations
  4. Equipment training
  5. Equipment driving test
  6. Permit to Access Controlled Areas and Facilities after demonstration of Competence using the cleanroom and trained equipments

 

Equipment for training:

Item No.

Equipment

Contact Person

1

FIB-DB235/FIB-H600

Aizi Jin, Wuxia Li

2

EBL-150

Haifang Yang

3

EBL-6300

Chengchun Tang

4

UV Mask Aligner(MA6

Baogang Quan

5

3D Direct Laser Writing

Wuxia Li

6

Nano imprinting

Aizi Jin

7

RIE Plasma 80, RIE NGP80

Xiaoxiang Xia, Zhe Liu

8

ICP Plasma 80, ICP Cobra

Xiaoxiang Xia, Zhe Liu

9

Ion Beam Etching

Baogang Quan

10

Microwave Plasma

Haifang Yang

11

Atomic Layer Deposition

Chengchun Tang

12

Thermal Evaporator

Baogang Quan

13

Electron Beam Evaporator

Baogang Quan

14

Plasma Enhanced Chemical Vapor Deposition

Xiaoxiang Xia

15

Dekteck Profiler

Aizi Jin

16

Wire-bonder

Aizi Jin

17

Atomic Force Microscope

Aizi Jin

18

Ellipsometer

Wuxia Li

19

Jannis Probe-stage

Chengchun Tang

20

Rapid Thermal Annealing

Zhe Liu

21

White Light 3D Surface Profiler

Chengchun Tang