Facilities

High Vacuum E-Beam Evaporator System(FU-12PEB)
Technical specifications and key features:
  • Deposited materials: High melting point metals and high purity insulators
  • Vacuum: < 3×10-7 Torr
  • Temperature during deposition: <90℃
  • Sample size: < 6” and small pieces of samples
  • Uniformity: <3%
  • Number of crucibles: 6
  • Installed with live thickness monitoring and automatic control system
Contact person:Baogang Quan

Techniques and Applications:
For various types of materials depositions during devices and structures fabrication.