Home-made LMF01 Dual Probe SEM In-situ Measuring System
Technical specifications and key features:
SEM resolution: 5 nm
Nano-manipulator precision: 50 nm
Temperature range: RT to 600ºC
Sample size: up to 2 inches
Contact person:Zhe Liu

Techniques and Applications:
With the installation of two probes into the SEM chamber, the localized properties, e.g. the electrical transport and field emission characteristics of nanoobjects can be measured as well as the temperature dependent behaviors.