Taiwan Juchang Science and Technology Peva-600E Electron Beam
Technical specifications and key features:
Deposited materials: High melting point metals and high purity insulators
Vacuum: < 2×10-7 Torr
Temperature during deposition: <90oC
Sample holder: 2 inches, 4 inches and small pieces of samples
Uniformity: <3%
Max. number of crucibles: 6
Installed with live thickness monitoring and automatic control system
Contact person:Baogang Quan

Techniques and Applications:
For various types of materials depositions during devices and structures fabrication.