中国科学院物理研究所微加工实验室

The LMF offers access to a wide range of cutting-edge scientific equipments for fabrication and characterization on the nano-scale, providing services at the Zhonguncun area and even world-widely. Cleanroom space and equipment is available to hire to external academic and insdustrial users. Structures from a few nm to a few hundred of μm, in the format of quantum dot to 3D based on various materials (including Si, III-V semiconductor, carbon based material, dielectrics, metals, metal oxides, polymers and biologic materials) can all be processed. We also explore and provide technologies for construction of various devices, e.g. field effect transistors, quantum devices, superconducting devices, magnetic information storage devices, nano optics, sing photon devices, single electron device, biodevices, sensors and detectors, plasmonic devices and new energy device.