Laboratory of Microfabrication

                                  Institute of Physics, CAS

Chinese Version

Based on the urgent demand on research of condensed matter physics in nanoscale, the Laboratory of Microfabrication（LMF）was established and operated formally in 2003, after one year preparation, construction of cleanroom and installation of equipments. The LMF is under the support of the National "Knowledge Innovation" Program aimed at promoting fundamental and applied research of condensed matter physics in the Institute of Physics (IOP). LMF has provided open access to researchers requiring nanotechnology support and joined the lab network of national center for nanoscience and nanotechnology. It was soon well known by the researchers in condensed matter physics field as the exchange base for nanofabrication technology.

LMF operates as a public technology platform and a supporting department to provide services to all other labs within IOP and also open to outside users. Apart from proving support to academic users, it also engages in research on fabrication, characterization and application of low-dimensional nanostructures, nanodevices and other related fields, through open subjects's connection and close coordination between LMF and other labs in IOP, making full use of every group’s and LMF's strength it their research areas and enhancing the scientific competence of the whole institute, broadening its knowledge in condensed matter at nanoscales and developing new device physics.

32 distinguished scientists from China and abroad have been invited to form two committees, one is the academic steering committee and the other is the international advisory committees.The roles of these committees are to supervise and monitor the performance, and advise on research directions and make sure the best operation of LMF. The laboratory has formed long-term and extensive international cooperation with the institutions and universities in more than 7 other countries. The total number of visiting scientists from foreign institutions is more than 30 in 2003.

Since 2003, the lab has been undertaking 18 open projects related to 19 groups from 8 labs in IOP. Forty researchers and students have been trained and can use the facilities in LMF independently. Most of these open projects were related to the National 973, 863 and Natural Science Foundation programs, which is a great challenge for us to deal with so many different materials, nanostructures and devices and all in nanoscale. To date we have made some significant achievements in fabrication of nanostructures and nanodevices, for example, nano-electrodes for the measurement of transport properties of individual one dimensional nanomaterials, DNA and UV detectors, optical crystal and left-hand materials, magnetic tunneling junctions, the nanostructures and devices of superconductive materials, etc. These are particularly valuable to promote the development of condensed matter physics in IOP.

Now LMF is striving to reach its goal of becoming an internationally known first class laboratory in the field of fabrication of nanostructures and nanodevices.

Introduction | Organization | Members | Facilities | Research | Achievements

Last modified: 2008-07-21.